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Active isolation system

The QuiET active isolation system offers a solution to cancel floor vibrations and motion system reaction forces, crucial for maintaining stability during high-end semiconductor processes.

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Characteristics

  • Active Isolation System: Cancels floor vibrations and motion system reaction forces along six degrees of freedom, ensuring stability during semiconductor processes.
  • Advanced Technology Integration: Seamlessly integrates with advanced motion platforms, minimizing move and settle times while compensating for motion stage reaction forces.
  • Modular and Scalable Design: Utilizes a combination of active and passive components for quick customization, with compatibility with standard AccurET controllers for easy integration.
  • User-Friendly Configuration: Features a graphical interface for intuitive setup, including automatic tuning of parameters and system identification, enhancing ease of use and efficiency.