CHARON2
CHARON2 is our most popular motion system platform. Through its robust and reliable stacked architecture, designed with modularity and scalability in mind, it is recognised as a cost effective entry point for many turn-key motion solutions.
The CHARON2 family comes in a multitude of different predefined configuration ranging from single X axis to complete 6 degree-of-freedom (DOF) motion system. The choice from our standard electronics makes the CHARON2 system scalable in performance to best meet the targeted specifications.
With over 3000 stages operating in the field, CHARON2 is addressing all semiconductor applications and many use cases of other markets, such as medical, pharmaceutical, or material science.
Its position accuracy of ±1 µm level paired with excellent bidirectional repeatability and high dynamics are reached in an optimized footprint thanks to proprietary IP for motors, electronics and controlling, demonstrating ETEL’s world-class innovation and expertise capabilities.
Characteristics
- Standard strokes of 365 x 355 mm and 475 x 410 mm
- Compact footprint and design suitable for space-limited applications
- Up to 6 degrees of freedom
- Up to 30 kg payload
- Built-in vacuum supply and customer signal cables at chuck level
Bidirectional repeatability
Position accuracy
Dynamics
CHARON2 stacked platforms
Here are the key features:
Ensures precise positioning accuracy over extended periods.
Suitable for controlled environments with stringent cleanliness requirements.
Enables precise adjustment for optimal positioning.
Additional 12 mm electric lifting mechanism to enable wafer loading and offloading.
Facilitates efficient operation by ensuring proper material handling.
Complies with ISO 2 clean room standards.
Quick response and stabilization for enhanced productivity.
Downloads
| Product | ||
|---|---|---|
CHARON2 X 0650 | Documents | |
CHARON2 XT 0205 x 0000 | Documents | |
CHARON2 XZ3TM 0205 x 0000 | Documents | |
CHARON2 XY 0365 x 0355 | Documents | |
CHARON2 XY 0475 x 0410 | Documents | |
CHARON2 XYT (DXR+) 0365 x 0355 | Documents | |
CHARON2 XYT (DXR+) 0475 x 0410 | Documents | |
CHARON2 XYZ3TM 0365 x 0355 | Documents | |
CHARON2 XYZ3TM 0475 x 0410 | Documents | |
CHARON2 XYZ3TM+ 0365 x 0355 | Documents | |
CHARON2 XYZ3TM+ 0475 x 0410 | Documents | |