Motion System Overview

AQUARIUS is an actuator designed for applications where force, throughput, durability and reliability are required – all in a compact form factor. It is ideal for applications that require an independent Z-axis for testing handheld devices and offers optimal performance. This solution is suitable for various applications where precision and high dynamic are important. With a…

AQUARIUS ST is the latest generation of our short stroke actuators specifically designed for “Test & Scan” turret applications. This series offers improved force control repeatability and higher throughput, which ultimately reduces the total cost of ownership of the machine. In “Test & Scan” turret handler applications, where precision and high dynamic are paramount, the AQUARIUS…

Introducing TUCANA, an actuator that fulfils the requirements of applications that demand force, throughput, durability and reliability, all in a compact form factor. It is particularly suitable for independent Z-axes for testing handlers with high performances. This is a versatile solution that can be used in various scenarios where precision and high dynamic are paramount. With…

The TUCANA ST marks the beginning of a new era for our short-stroke drives, which have been specially developed for “test & scan” turret handlers applications. Compared to its predecessor, the ST series offers improved force control repeatability and higher throughput, which ultimately reduces the final cost of ownership of the machine. Key parameters such as…

The TBS linear axis by ETEL offers unparalleled precision and performance, making it the ideal solution for high accuracy applications across diverse industries. The TBS is a high-precision linear axis with 1 Degree Of Freedom, utilizing a mechanical bearing-based indirect drive system. This design provides exceptional accuracy and precision within its category. Controlled by a high-performance,…

The DynX Rotary Series offers a range of precision rotary positioning axes, providing high reliability, outstanding accuracy, low maintenance, and easy integration for various applications. Featuring three different diameters, the DynX rotary series serves as an ideal standard solution for applications requiring smooth motion, high speed stability, and precise positioning. These rotary stages are seamlessly integrated…

The DXR+ is a rotary module designed for mid-end applications in the semiconductor and electronics industries, featuring a compact design, light mass, and large hollow shaft to optimize performance to cost ratio. The system offers significant improvements in rigidity and directly increases the control bandwidth of the supporting XY tables. It operates over a wide range…

Our latest rotary axis solution, the DXRH, 1 degree of freedom (DOF) mechanical bearing design, is characterised by exceptional accuracy. The DXRH is characterised by its encoder system and unrivalled mechanical properties comparable to those of air bearing solutions – without the associated complexity. Supported by HEIDENHAIN best in class encoder and bearing technology and our…

This series offers high-precision indexing tables with five different active lengths, featuring our direct drive torque motors for exceptional performance in applications requiring high repeatability and short indexing times. Integrated with our direct drive torque motors, the RTMBi Series excels in providing high acceleration during indexation with low power dissipation. This standard solution ensures high duty…

The RTMB+ family offers high-precision rotary indexing tables in two different diameters, active lengths and windings per size. Our direct-drive TMB+ torque motors provide exceptional performance in applications that require high repeatability and short indexing times. By integrating our TMB+ direct drive torque motors, the RTMB+ series ensures high acceleration during indexing with low power dissipation,…

The ZT box module offers two degrees of freedom – Z and Theta – in a single unit, with both coarse and fine Z-axis adjustments available. Designed for wafer process control applications, it can function independently or be mounted atop an XY platform. This module provides versatile motion control capabilities, featuring infinite rotation and built-in vacuum…

The Z3TM module expands the range of motion platforms, offering four independent degrees of freedom for advanced semiconductor applications. Designed for advanced semiconductor applications, this module offers four independent degrees of freedom – 3 rotary axes (RX, RY, RZ) and one vertical (Z) – achieving exceptional performance in terms of wafer-level accuracy and dynamics in a…

The Z3TM+ module expands the range of motion platforms and integrates four independent degrees of freedom in an enlarged theta hollow shaft. This module revolutionises motion control in the semiconductor industry through its advanced design with four degrees of freedom housed in an enlarged theta hollow shaft. With optional coarse Z-axes, this module provides unprecedented control…

CHARON2 is our most popular motion system platform. Through its robust and reliable stacked architecture, designed with modularity and scalability in mind, it is recognised as a cost effective entry point for many turn-key motion solutions. The CHARON2 family comes in a multitude of different predefined configuration ranging from single X axis to complete 6 degree-of-freedom…

HD stands for high dynamics. With CHARON2HD, dynamics of the existing base product are doubled without compromise on performance. As for the CHARON2 family, the HD versions come in a multitude of different predefined configuration ranging from single X axis to complete 6 degree-of-freedom (DOF) motion system. The choice from our standard electronics makes the CHARON2HD…

VULCANO2 is our gantry stacked-axes architecture combining our renowned ironcore motors, mechanical bearing and high-end optical encoders to deliver great geometrical performance at high dynamics. When compared to our stacked CHARON2 family, the VULCANO2 mainly comes with higher duty cycle and payload capabilities. Its compact footprint maximises cost efficiency without compromising throughput and duty cycles. Whether…

Introducing METIS, a state-of-the-art hybrid planar mechanical/air bearing platform designed for step and scan applications, ensuring unparalleled accuracy, move & settle times and speed stability over 4 degrees of freedom. The METIS platform is a cutting-edge hybrid planar mechanical/air bearing platform, dedicated to step and scan applications with four-axis movement in X, Y, Z, and Theta…

TELICA, a cutting-edge multi-axes platform, is revolutionizing semiconductor back-end applications with its dual gantry architecture, offering unmatched accuracy and throughput for advanced die bonding applications and more. TELICA is a multi-axes platform designed for semiconductor back-end applications, featuring a dual gantry architecture that offers motion along four degrees of freedom (X, Y, Z, and Rz) with…

Experience unprecedented process stability with the QuiET active isolation system, neutralizing floor vibrations and cancelling out motion system reaction forces, ensuring flawless operation of your machine. In semiconductor applications, vibration can drastically affect machine accuracy and throughput performance. ETEL’s QuiET Series revolutionizes this, augmenting our Forward Integration Strategy by seamlessly integrating advanced motion systems and state-of-the-art…