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QuiET active isolation system

Experience unprecedented process stability with the QuiET active isolation system, neutralizing floor vibrations and cancelling out motion system reaction forces, ensuring flawless operation of your machine.

In semiconductor applications, vibration can drastically affect machine accuracy and throughput performance. ETEL’s QuiET Series revolutionizes this, augmenting our Forward Integration Strategy by seamlessly integrating advanced motion systems and state-of-the-art controllers with our proprietary active isolation module. This comprehensive solution minimizes move and settle times, harnessing a unique digital control architecture to offset reaction forces and maintain process accuracy.

With its modular design coupled to standard AccurET controllers, the QuiET Series offers unparalleled adaptability and reliability, promising optimal performance tailored to your requirements.

Characteristics

  • Forward Integration Strategy enhancing ETEL’s motion platform capabilities
  • Proprietary active isolation module for vibration cancellation over 6 Degrees of Freedom (6 DOF)
  • High acceleration feed-forward accuracy
  • Digital motion control architecture based on 1 Gb TransnET
  • Modular and scalable design with customizable components
  • Integrated AccurET controllers for seamless integration and easy serviceability
isolation type
Isolation type
fully active over 6 DoF
drive force cancellation
Drive force cancellation
Feed-forward accuracy up to 99%
payload
Payload
up to 1000 kg
motion-systems-QuiET

QuiET active isolation system

Here are the key features of our models:

Cancels floor vibrations and motion system reaction forces along six degrees of freedom, ensuring your semiconductor process stability.

Low frequency spring based isolator coupled with active damping through linear motors and dedicated high-end sensors.

Pre-selected standard components allowing quick customization to your application needs, compatible with standard AccurET controllers for an homogeneous and high performing control architecture.

Pre-selected standard components allowing quick customization to your application needs, compatible with standard AccurET controllers for an homogeneous and high performing control architecture.