Combined Modules

The ZT box module offers two degrees of freedom – Z and Theta – in a single unit, with both coarse and fine Z-axis adjustments available. Designed for wafer process control applications, it can function independently or be mounted atop an XY platform. This module provides versatile motion control capabilities, featuring infinite rotation and built-in vacuum…

The Z3TM module expands the range of motion platforms, offering four independent degrees of freedom for advanced semiconductor applications. Designed for advanced semiconductor applications, this module offers four independent degrees of freedom – 3 rotary axes (RX, RY, RZ) and one vertical (Z) – achieving exceptional performance in terms of wafer-level accuracy and dynamics in a…

The Z3TM+ module expands the range of motion platforms and integrates four independent degrees of freedom in an enlarged theta hollow shaft. This module revolutionises motion control in the semiconductor industry through its advanced design with four degrees of freedom housed in an enlarged theta hollow shaft. With optional coarse Z-axes, this module provides unprecedented control…